Diamond nanofocusing refractive X-ray lenses made by planar etching technology
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2019-08-01 |
| Journal | Journal of Synchrotron Radiation |
| Authors | Mikhail Lyubomirskiy, Pit Boye, Jan M. Feldkamp, Jens Patommel, Sebastian Schƶeder |
| Institutions | Deutsches Elektronen-Synchrotron DESY, Diamond Materials (Germany) |
| Citations | 9 |
Abstract
Section titled āAbstractāThe manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron-beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360 nm (FWHM) at an energy E = 24.3 keV is observed.