Skip to content

Recent Progress in Solar-Blind Photodetectors Based on Ultrawide Bandgap Semiconductors

MetadataDetails
Publication Date2024-06-05
JournalACS Omega
AuthorsLixia Wang, Shengming Xu, Jiangang Yang, Hui Huang, Zhe Huo
InstitutionsBeihang University, Wuhan University
Citations33
AnalysisFull AI Review Included

Technical Analysis: Ultrawide Bandgap Diamond for Solar-Blind Photodetection

Section titled “Technical Analysis: Ultrawide Bandgap Diamond for Solar-Blind Photodetection”

This documentation analyzes the requirements and achievements detailed in “Recent Progress in Solar-Blind Photodetectors Based on Ultrawide Bandgap Semiconductors,” focusing on the role of diamond as a critical UWBG material for high-performance deep-UV (DUV) applications.


The review confirms that diamond, with its ultrawide bandgap (~5.5 eV), is an ideal platform for high-performance Solar-Blind Photodetectors (SBPDs). Key findings and material requirements are summarized below:

  • Superior Intrinsic Properties: Diamond exhibits the highest electron and hole mobilities, exceptional thermal conductivity, and high breakdown field among UWBG candidates (Ga2O3, AlGaN/AlN), enabling operation in harsh, high-power environments.
  • Solar-Blind Performance: Diamond-based SBPDs demonstrate excellent DUV selectivity (cutoff wavelength < 225 nm) and high rejection ratios (UV/Visible response ratio up to 105).
  • High Responsivity and Speed: Reported devices achieve ultrahigh photoresponsivity (up to 524.9 A W-1) and fast response times (as low as 13 ns), often attributed to high-quality CVD films and optimized metal-semiconductor-metal (MSM) or Schottky architectures.
  • Material Challenge: The primary limitation for commercialization is the availability of large-area, high-quality single-crystal diamond substrates and the challenge of reliable n-type doping.
  • CVD Technology Focus: High-quality MPCVD (Microwave Plasma CVD) thin films are crucial for achieving high quantum efficiency and controlling defect density, which directly impacts dark current and response speed.
  • Architectural Requirements: Successful SBPDs utilize planar geometries with interdigitated electrodes (MSM) or vertical Schottky diodes, often requiring custom metalization (Au, Ti/Au, Pt, W) to manage contact barriers.

The table below extracts key performance metrics achieved by diamond-based SBPDs discussed in the review, highlighting the potential of high-quality CVD material.

ParameterValueUnitContext / Reference
Bandgap (Eg)~5.5eVIdeal UWBG for DUV/Solar-Blind detection.
Cutoff Wavelength (λ0)< 225nmRequired for solar-blind operation.
Peak Photoresponsivity (R)524.9A W-1Highest reported value (MSM, 220 nm, 13 V bias).
External Quantum Efficiency (EQE)92%High-quality MPCVD film (MSM, 220 nm, 6 V bias).
Specific Detectivity (D*)3.42 x 1015Jones (cm Hz1/2 W-1)Highest reported value (MSM, 220 nm, 13 V bias).
Dark Current (Idark)0.1 - 1pASingle crystal diamond pixel photodetector (MSM).
Response Time (τr)13nsShortest reported rise time (MSM, 222 nm).
UV/Visible Rejection Ratio105RatioHigh selectivity achieved in MSM devices (218 nm).
Substrate TypeSingle Crystal / PolycrystallineN/ACVD thin films grown on various substrates.

The successful fabrication of high-performance diamond SBPDs relies heavily on advanced CVD growth and post-processing techniques.

  1. Material Synthesis:
    • CVD Growth: Chemical Vapor Deposition (CVD), specifically Microwave Plasma CVD (MPCVD), is the standard method for depositing high-quality diamond thin films (Section 3.2).
    • Doping: Boron doping is used to achieve p-type conductivity (Boron-Doped Diamond, BDD). N-type doping (P or S) remains challenging but is essential for homojunction p-n devices (Section 5.4).
  2. Device Architecture & Contact Engineering:
    • Planar Geometries: MSM photodetectors and photoconductors utilize interdigitated electrode configurations to maximize photosensitive area and minimize carrier transit distance (Section 2.1.2).
    • Schottky Barrier Modulation: Hydrogen plasma surface treatment is used to modulate the Schottky barrier height at the metal/diamond interface, enhancing performance and reducing dark current (Section 5.2).
    • Ohmic Contact Formation: Achieving low-resistance ohmic contacts is difficult. Methods include using specific metals (Ti/Au, Ti/WC) or laser-induced graphitization (Section 5.1).
  3. Performance Enhancement Techniques:
    • 3D Electrodes: Laser writing or ion beam lithography is used to create 3D electrode structures within the diamond bulk to enhance carrier collection efficiency (Section 5.1).
    • Localized Surface Plasmon (LSP): Integrating metal nanoparticles (e.g., Pd, Al NPs) to enhance UV absorption and photoresponsivity (Section 5.2).

As an expert material scientist and technical sales engineer for 6CCVD, we recognize that the challenges highlighted in this review—specifically the need for large-area, high-quality CVD diamond and precise contact engineering—are directly addressed by our core capabilities.

To replicate or extend the high-performance diamond SBPD research cited, 6CCVD recommends the following materials, grown via our proprietary MPCVD process:

6CCVD MaterialSpecificationApplication in SBPD Research
Optical Grade SCDSingle Crystal Diamond (SCD) plates, Ra < 1nm polished.Required for the highest performance Schottky and MSM devices (e.g., Qiu et al., 13 ns response time).
Polycrystalline Diamond (PCD)Plates/wafers up to 125mm, Ra < 5nm polished.Essential for large-area SBPD arrays and commercial scaling, overcoming the size limitations of SCD mentioned in the review.
Boron-Doped Diamond (BDD)Custom doping levels (p-type).Necessary for fabricating p-n and p-i-n heterojunctions, addressing the challenge of effective p-type doping in UWBG materials (Section 5.4).
High-Purity SCD SubstratesThickness up to 10mm.Used as robust, high thermal conductivity substrates for high-power DUV applications, mitigating thermal issues noted in other UWBG materials like Ga2O3.

6CCVD’s in-house engineering and fabrication services are specifically designed to meet the complex requirements of UWBG photodetector development:

  • Custom Dimensions: We offer SCD and PCD plates/wafers up to 125mm in diameter, directly addressing the paper’s call for large-area substrates necessary for commercialization and focal plane arrays (FPAs).
  • Precision Thickness Control: SCD and PCD films can be grown and processed to precise thicknesses ranging from 0.1 ”m (for thin-film absorption layers) up to 500 ”m (for robust substrates), allowing researchers to optimize the depletion region width for enhanced Quantum Efficiency (QE) and response speed.
  • Advanced Metalization Services: We provide internal metal deposition capabilities for the critical electrode materials cited in the research, including Au, Pt, Pd, Ti, W, and Cu. This enables the rapid prototyping and optimization of MSM, Schottky, and ohmic contacts (e.g., Ti/Au, Pt/Diamond interfaces).
  • Ultra-Low Roughness Polishing: Our SCD material achieves surface roughness (Ra) < 1nm, and inch-size PCD achieves Ra < 5nm. This ultra-smooth surface is critical for high-quality epitaxial growth (homoepitaxy) and minimizing surface defects that contribute to high dark current and slow Persistent Photoconductivity (PPC) effects.

6CCVD maintains an in-house team of PhD-level material scientists specializing in MPCVD diamond growth and characterization. We offer comprehensive engineering support for projects focused on Solar-Blind DUV Photodetection, High-Power Electronics, and Quantum Sensing. Our team can assist researchers in:

  1. Selecting the optimal diamond grade (SCD vs. PCD) based on required area, thermal management, and optical clarity.
  2. Designing custom doping profiles (BDD) for p-type layers in p-n junction devices.
  3. Developing specific metalization stacks to achieve desired Schottky barrier heights or low-resistance ohmic contacts.

To accelerate your research in UWBG solar-blind photodetectors using the superior properties of MPCVD diamond, 6CCVD is your trusted partner for high-quality, customized materials.

For custom specifications or material consultation, visit 6ccvd.com or contact our engineering team directly.

View Original Abstract

Ultrawide bandgap (UWBG) semiconductors, including Ga<sub>2</sub>O<sub>3</sub>, diamond, Al <sub><i>x</i></sub> Ga<sub>1-<i>x</i></sub> N/AlN, featuring bandgaps greater than 4.4 eV, hold significant promise for solar-blind ultraviolet photodetection, with applications spanning in environmental monitoring, chemical/biological analysis, industrial processes, and military technologies. Over recent decades, substantial strides in synthesizing high-quality UWBG semiconductors have facilitated the development of diverse high-performance solar-blind photodetectors (SBPDs). This review comprehensively examines recent advancements in UWBG semiconductor-based SBPDs across various device architectures, encompassing photoconductors, metal-semiconductor-metal photodetectors, Schottky photodiodes, p-n (p-i-n) photodiodes, phototransistors, etc., with a systematic introduction and discussion of their operational principles. The current state of device performance for SBPDs employing these UWBG semiconductors is evaluated across different device configurations. Finally, this review outlines key challenges to be addressed, aiming to steer future research endeavors in this critical domain.