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Integrated Magnetometry Platform with Stackable Waveguide-Assisted Detection Channels for Sensing Arrays

MetadataDetails
Publication Date2021-05-26
JournalPhysical Review Applied
AuthorsMichael Hoese, Michael K. Koch, Vibhav Bharadwaj, Johannes Lang, John P. Hadden
InstitutionsThe University of Tokyo, Cardiff University
Citations24
AnalysisFull AI Review Included

Integrated Diamond Magnetometry Platform: Technical Analysis and 6CCVD Solutions

Section titled “Integrated Diamond Magnetometry Platform: Technical Analysis and 6CCVD Solutions”

This document analyzes the research paper “An integrated magnetometry platform with stackable waveguide-assisted detection channels for sensing arrays” (arXiv:2012.02560v1) and outlines how 6CCVD’s advanced MPCVD diamond materials and customization capabilities can support the replication, scaling, and extension of this quantum sensing architecture.


The research successfully demonstrates a novel, integrated quantum sensing platform utilizing shallow-implanted Nitrogen Vacancy (NV$^{-}$) centers in diamond, optically accessed via femtosecond-laser-written waveguides.

  • Core Value Proposition: Achieves efficient optical access to NV$^{-}$ ensembles located near the diamond surface (5 ”m to 25 ”m depth) using Type-II waveguides, enabling sensing without direct light exposure to the sample area.
  • Material Foundation: The platform relies on high-quality, electronic grade, low-nitrogen Single Crystal Diamond (SCD) slabs (Type II, N impurities < 5 ppb).
  • Performance Metrics: Demonstrated magnetic field sensitivity up to 36 ”T Hz-1/2 (confocal) and a resolution better than 6 ”T.
  • Scalability: The architecture is designed for extension into two-dimensional sensing arrays, addressing large NV ensembles (105 ”m2 mode area) and yielding a theoretical sensitivity improvement factor of 41 over conventional confocal methods.
  • Fabrication Method: Combines femtosecond laser writing for 3D waveguide structures with shallow nitrogen ion implantation (5 keV, 5 x 1011 cm-2 dose) and high-temperature UHV annealing (1000 °C).
  • Versatility: The device is compatible with a large temperature range, from cryogenic temperatures up to 324 K, enabling both magnetic field and temperature sensing.

The following table extracts key parameters and performance data from the research.

ParameterValueUnitContext
Diamond Material GradeElectronic Grade, Type IIN/ANitrogen impurities < 5 ppb
Substrate Dimensions2 x 2 x 0.3mmSlab size used for fabrication
Waveguide Length2mmMatches substrate dimension
Waveguide Width (C-to-C)15”mTransverse spacing between laser tracks
Waveguide Depth Range5 to 25”mBelow top diamond surface
Nitrogen Ion Implantation Energy5keVUsed for shallow NV creation
Nitrogen Ion Dose5 x 1011cm-2Implantation density
UHV Annealing Temperature1000°CRequired for NV$^{-}$ center formation
CW-ODMR Sensitivity (Confocal)36”T Hz-1/2Benchmark measurement
CW-ODMR Sensitivity (Waveguide)62”T Hz-1/2Detected via transmission
Magnetic Field Resolution< 6”TEstimated from fit error margins
ODMR Linewidth (FWHM)7.5MHzObserved in both configurations
Waveguide Mode Field Area (1/e2)105”m2Large ensemble sensing area
ZFS Parameter D Gradient (dD/dT)-40 ± 18kHz K-1Used for temperature sensing

The integrated sensor fabrication relies on precise material growth, laser processing, and defect engineering.

  1. Substrate Selection: Used 2 mm x 2 mm x 0.3 mm synthetic Single Crystal Diamond (SCD), Type II, electronic grade, with ultra-low nitrogen impurities (< 5 ppb).
  2. Waveguide Fabrication (Femtosecond Laser Writing):
    • A Yb:KGW Fiber Laser (515 nm, 300 fs pulse duration, 500 kHz repetition rate, 100 mW power) was focused using a high-NA objective (1.25 NA).
    • Type-II waveguides were created by writing two nearby lines of reduced refractive index, utilizing the stressed region between them as the waveguide core.
  3. NV$^{-}$ Center Creation (Shallow Implantation):
    • Nitrogen ions (N15+) were implanted into the front facet of the diamond platform.
    • Implantation parameters were 5 keV energy and a dose of $5 \times 10^{11}$ cm-2, targeting NV creation a few nanometers below the surface.
  4. Thermal Processing:
    • Substrates were annealed in Ultra-High Vacuum (UHV) at 1000 °C for 3 hours to mobilize vacancies and form stable NV$^{-}$ centers.
  5. Surface Cleaning:
    • Aggressive acid boiling (1:1:1 mixture of sulphuric, perchloric, and nitric acid) was performed between processing steps to remove graphitic and organic residues, ensuring a clean surface for sensing.
  6. Optical Detection: CW-ODMR measurements were performed using 532 nm excitation and collecting the NV fluorescence (630 nm to 740 nm) through the waveguide mode.

6CCVD is uniquely positioned to supply the foundational diamond material required for this advanced integrated quantum sensing research and to facilitate its scaling into commercial arrays.

The success of this platform hinges on the quality and purity of the diamond host.

Research Requirement6CCVD Material SolutionTechnical Justification
Ultra-High Purity SubstrateSCD (Electronic Grade, Low N)Provides the necessary low background nitrogen (< 5 ppb) essential for controlled NV$^{-}$ creation via implantation, minimizing background noise.
High-Quality SCD PlatesSCD Plates (0.1 ”m to 500 ”m)Ensures the high crystal quality and low birefringence required for efficient femtosecond laser writing of Type-II waveguides and low-loss photon routing.
Large-Area ArraysPCD Wafers (Up to 125 mm)For scaling the architecture into large 2D sensing arrays, 6CCVD offers large-area Polycrystalline Diamond (PCD) substrates, or thick SCD substrates (up to 10 mm) for robust platforms.

The research utilized specific dimensions (2 mm x 2 mm x 0.3 mm) and required precise surface preparation for shallow implantation. 6CCVD offers comprehensive customization services to optimize the substrate for integration.

  • Custom Dimensions and Thickness: 6CCVD can supply SCD plates in the exact thickness (0.3 mm) and custom lateral dimensions required for specific experimental setups or for scaling up to larger arrays (e.g., 10 mm thick substrates).
  • Ultra-Low Roughness Polishing: Shallow implantation and subsequent surface sensing require atomically smooth surfaces. 6CCVD guarantees Ra < 1 nm polishing for SCD, ensuring optimal surface quality for both implantation and subsequent biological/material sensing applications.
  • Metalization Services: Although the paper used an external wire for MW delivery, future integrated designs may require on-chip microwave structures. 6CCVD offers internal metalization capabilities (Au, Pt, Pd, Ti, W, Cu) for depositing coplanar waveguides (CPWs) directly onto the diamond surface, streamlining the integration of the MW field delivery system.
  • Laser Cutting and Shaping: 6CCVD provides precision laser cutting services to achieve complex geometries or specific facet orientations necessary for coupling light into the laser-written waveguides.

The integration of laser writing, ion implantation, and ODMR spectroscopy is highly complex. 6CCVD’s in-house PhD team specializes in optimizing diamond substrates for quantum applications.

  • Material Optimization for Implantation: Our experts can consult on optimizing SCD crystal orientation and surface termination to maximize the yield and coherence time of shallow-implanted NV$^{-}$ centers for similar Integrated Quantum Magnetometry projects.
  • Scaling and Array Design: We provide technical consultation on selecting the appropriate diamond type (SCD vs. PCD) and dimensions for scaling the demonstrated architecture into large, high-density 2D sensing arrays.
  • Global Logistics: 6CCVD ensures reliable global shipping (DDU default, DDP available) for sensitive, high-value diamond substrates, supporting international research collaborations.

For custom specifications or material consultation, visit 6ccvd.com or contact our engineering team directly.

View Original Abstract

The negatively charged nitrogen vacancy (N-V−) center in diamond has shown great success in nanoscale, high-sensitivity magnetometry. Efficient fluorescence detection is crucial for improving the sensitivity. Furthermore, integrated devices enable practicable sensors. Here, we present an integrated architecture which allows us to create N-V− centers a few nanometers below the diamond surface, and at the same time covering the entire mode field of femtosecond-laser-written type-II waveguides. We experimentally verify the coupling efficiency, showcase the detection of magnetic resonance signals through the waveguides and perform proof-of-principle experiments in magnetic field and temperature sensing. The sensing task can be operated via the waveguide without direct light illumination through the sample, which is important for magnetometry in biological systems that are sensitive to light. In the future, our approach will enable the development of two-dimensional sensing arrays facilitating spatially and temporally correlated magnetometry.