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Selective area growth of GaN nanowires and nanofins by molecular beam epitaxy on heteroepitaxial diamond (001) substrates

MetadataDetails
Publication Date2021-01-01
JournalNanoscale Advances
AuthorsFlorian Pantle, Fabian Becker, Max Kraut, Simon Wƶrle, Theresa Hoffmann
InstitutionsTechnical University of Munich, Max Planck Computing and Data Facility
Citations11

We present the selective area growth of GaN nanowires and nanofins on large-scale available diamond substrates. The nanostructures grow exclusively Ga-polar, enabling their application in GaN-on-diamond based high-power transistor applications.