Diamond micro-CRL for Coherent x-ray imaging and microscopy
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2020-01-01 |
| Journal | AIP conference proceedings |
| Authors | Polina Medvedskaya, Ivan Lyatun, Sergey Shevyrtalov, Alexey Korotkov, Maxim Polikarpov |
| Institutions | Institute of Microelectronics Technology and High Purity Materials, European Synchrotron Radiation Facility |
| Citations | 1 |
Abstract
Section titled āAbstractāWe demonstrate the capabilities of ion-beam lithography (IBL) for the manufacturing of the X-ray refractive micro-optics. With the help of IBL, the hardest of current materials - diamond - was milled, and microscale diamond lenses were produced. Lenses have a rotationally parabolic profile with radii of parabola apexes less than 5 Āµm. As has been confirmed with SEM and AFM, shape profile errors of fabricated lenses were<200 nm, while the surface roughness was estimated to be 50 nm. Single lenses were stacked in the CRL within one technological process with high alignment precision.