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Chip-integrated plasmonic cavity-enhanced single nitrogen-vacancy center emission

MetadataDetails
Publication Date2017-01-01
JournalNanoscale
AuthorsHamidreza Siampour, Shailesh Kumar, Sergey I. Bozhevolnyi, Hamidreza Siampour, Shailesh Kumar
InstitutionsOdense Municipality, University of Southern Denmark
Citations44
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Chip-Integrated Plasmonic Cavities for Enhanced NV Center Quantum Emitters: Technical Analysis and 6CCVD Solutions

Section titled “Chip-Integrated Plasmonic Cavities for Enhanced NV Center Quantum Emitters: Technical Analysis and 6CCVD Solutions”

This documentation analyzes the key findings, methodologies, and technical requirements of the research paper “Chip-integrated plasmonic cavity-enhanced single nitrogen-vacancy center emission” and aligns them with 6CCVD’s advanced MPCVD diamond capabilities to support scalable quantum network development.


The research demonstrates a highly efficient, chip-integrated single-photon source based on Nitrogen-Vacancy (NV) centers in nanodiamonds coupled to a hybrid plasmonic-photonic cavity. This configuration successfully addresses the need for bright, spectrally pure quantum emitters operating at room temperature.

  • Record Enhancement: Achieved an up to 42-fold enhancement of the spontaneous emission decay rate (Purcell Effect) at the cavity resonance, indicating superior mode confinement and coupling.
  • Spectral Purity: The cavity operates with a Quality Factor (Q) of approximately 70, resulting in a narrow emission bandwidth of 10 nm, crucial for high-fidelity quantum applications.
  • Wavelength Flexibility: Demonstrated full tunability of the cavity resonance across the Zero-Phonon Line (ZPL) of multiple diamond color centers, including NV (637 nm), SiV (738 nm), and potential for Ge-V (602 nm).
  • Lifetime Reduction: The NV center excited state lifetime was significantly reduced from ~10 ns (uncoupled) to ~3 ns (coupled), improving emission repetition rate.
  • High Integration: The platform uses a Dielectric-Loaded Surface Plasmon Polariton Waveguide (DLSPPW) fabricated via Electron-Beam Lithography (EBL) on an Ag/Si substrate, enabling deterministic, high-precision placement of single emitters (< 30 nm tolerance).
  • Efficiency: Achieved a high SPP coupling efficiency (ÎČ-factor) of approximately 58% for the NV-DLSPPW hybrid system.

Key experimental and simulated data extracted from the research paper are summarized below:

ParameterValueUnitContext
Overall Decay Rate Enhancement (Purcell Factor)Up to 42foldAt cavity resonance peak (Г = 42Гo)
Excited State Lifetime (Uncoupled NV)~10nsBaseline NV emission
Excited State Lifetime (Coupled NV)~3nsSignificant reduction due to Purcell effect
Measured SPP Coupling Efficiency (ÎČ-factor)~58%NV center emission channeled into plasmonic modes
Cavity Quality Factor (Q)~70-Indicating spectral filtering ability
Full Width at Half Maximum (FWHM)~10nmCorresponds to the Q factor
Silver (Ag) Film Thickness250nmDeposited on Silicon (Si) wafer
Ag Deposition Vacuum Pressure2E-7TorrThermal evaporation environment
Ag Deposition Rate4nm/sSpeed of metalization process
HSQ DLSPPW Ridge Width (W)250nmPatterned dielectric dimensions
HSQ DLSPPW Ridge Height (H)180nmPatterned dielectric dimensions
DBR Transverse Ridge Width140nmDistributed Bragg Reflector element
DBR Period (A)325nmDetermines resonance wavelength tunability
SPP Propagation Length (LSPP) (Simulated)~7.5”mMeasure of plasmon loss in the DBR structure

The experiment utilized top-down nanofabrication techniques for deterministic placement and structuring of the hybrid plasmonic-photonic circuits on diamond-containing substrates.

  1. Substrate & Metalization: A silicon wafer was coated with a high-purity Silver (Ag) film (250 nm thickness) via thermal evaporation under high vacuum conditions (2E-7 Torr, 4 nm/s rate).
  2. Emitter Integration: High-quality nanodiamonds (NDs) containing NV centers (Microdiamant MSY 0-50 nm GAF) were spin-coated onto the Ag-coated silicon substrate.
  3. Dielectric Deposition: A film of Hydrogen Silsesquioxane (HSQ) e-beam resist (refractive index 1.41) was spin-coated (1200 rpm) to create a 180 nm thick dielectric layer.
  4. Structure Fabrication: Electron-Beam Lithography (EBL) was employed to pattern the HSQ layer, defining the high-resolution features:
    • DLSPPW ridges (250 nm width, 180 nm height).
    • DBR cavity structures (140 nm width, period A = 325 nm).
  5. Optical Characterization: NV center emission spectra, lifetimes (10 ns to 3 ns reduction), and second-order autocorrelation functions (g2(0) < 0.5, confirming single-photon emission) were measured using confocal microscopy.
  6. Simulation & Design: Finite Difference Time Domain (FDTD) and Finite-Element Modeling (FEM) simulations were crucial for predicting stopband characteristics and determining optimal SPP propagation lengths and effective mode volumes.

6CCVD provides the specialized, high-purity diamond materials and custom engineering services required to replicate, scale, and advance this critical research in integrated quantum optics.

The foundation of this research is the diamond material containing high-quality color centers. 6CCVD provides industry-leading MPCVD substrates perfectly suited for quantum engineering:

MaterialKey SpecificationsRelevance to Quantum Integrated Circuits
Optical Grade Single Crystal Diamond (SCD)Low nitrogen content, high crystalline quality, thickness range: 0.1 ”m - 500 ”m.Ideal precursor for creating high-coherence NV, SiV, or GeV centers through implantation or growth techniques. Essential for platforms demanding minimal strain and low background fluorescence.
Custom Size Polycrystalline Diamond (PCD)Wafers up to 125 mm diameter; thickness up to 500 ”m.Provides scalable, large-area substrates suitable for complex integrated quantum networks and microfluidic integration where SCD cost is prohibitive.
Boron-Doped Diamond (BDD)Custom BDD films available.Required for engineering active quantum photonic components or highly conductive diamond layers that might serve as electrodes or resistive heaters in complex chip designs.

The paper’s success hinges on precise material dimensions, surface quality, and the Ag metal layer. 6CCVD is uniquely positioned to fulfill these custom requirements:

  • Precision Polishing (Ra < 1 nm): The high-Q factor and efficient plasmonic coupling rely on ultra-smooth surfaces. 6CCVD provides polishing down to Ra < 1 nm for SCD and Ra < 5 nm for inch-size PCD, ensuring minimal scattering loss for SPP propagation.
  • Custom Metalization Stacks: The research required a high-quality 250 nm Silver (Ag) film on the substrate. 6CCVD offers extensive in-house metalization capabilities, including standard Ti/Pt/Au, and specialized metals critical for plasmonics:
    • Custom Au, Pt, Pd, Ti, W, Cu deposition. (Specific Ag deposition can be engineered upon request based on customer stack specifications.)
  • Custom Dimensions and Substrate Integration: While the paper used chip-scale devices, 6CCVD can supply SCD or PCD in plates or wafers up to 125 mm to facilitate pilot production and large-scale quantum chip integration, compatible with standard semiconductor fabrication tools (e.g., EBL).

6CCVD’s in-house team of PhD material scientists and engineers understand the complex interplay between diamond quality, nanofabrication, and quantum performance metrics (Purcell enhancement, Q-factor, coherence time).

  • Material Selection: We offer specialized support in selecting the optimal diamond substrate (SCD vs. PCD, specific crystal orientation, pre-existing impurity levels) to maximize the yield and performance of NV and SiV centers for on-chip realization of quantum-optical networks.
  • Nanofabrication Compatibility: Consultation is available regarding surface preparation and compatibility with advanced lithography techniques (like EBL using HSQ resist) and metal deposition processes required for plasmonic and photonic structures.

For custom specifications or material consultation related to quantum emitters, plasmonic coupling, or integrated photonics projects, visit 6ccvd.com or contact our engineering team directly.

View Original Abstract

We demonstrate a chip-integrated cavity for the selective enhancement of single photon emission from a diamond color center coupled to a plasmonic waveguide mode.