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Diamond optomechanical crystals

MetadataDetails
Publication Date2016-11-17
JournalOptica
AuthorsMichael J. Burek, Justin Cohen, SeĂĄn M. Meenehan, Nayera El-Sawah, Cleaven Chia
InstitutionsHarvard University, University of Waterloo
Citations157
AnalysisFull AI Review Included

DIAMOND OPTOMECHANICAL CRYSTALS: Material Requirements & 6CCVD Solutions

Section titled “DIAMOND OPTOMECHANICAL CRYSTALS: Material Requirements & 6CCVD Solutions”

This documentation analyzes the key findings of research into high-performance diamond Optomechanical Crystals (OMCs), highlighting the necessary material specifications and connecting them directly to 6CCVD’s advanced CVD diamond offerings for quantum and optomechanical applications.

  • Platform Validation: Demonstrates Single-Crystal Diamond (SCD) OMCs operating in the resolved-sideband regime, establishing diamond as a superior platform for high-frequency quantum transduction.
  • Record Cooperativity: Achieved record room-temperature optomechanical cooperativity (C ≈ 20) in diamond, necessary for strong mechanical driving and effective laser cooling.
  • Ultra-High Q-Factor: Realized exceptional mechanical quality factors (Qm) up to Qm ~ 7700 at 9.45 GHz, corresponding to an f·Q product of ~7.3 x 1013 Hz—among the highest reported for monolithic room-temperature diamond oscillators.
  • High Purity Requirement: The successful fabrication relied on ultra-high purity MPCVD SCD substrates (nitrogen content ~1 ppb N) to minimize optical absorption and thermal dissipation effects.
  • Key Functionality: The devices co-localize 200 THz photons (telecom band) and 5-10 GHz acoustic phonons, enabling critical phenomena like Optomechanically Induced Transparency (OMIT) and phonon lasing.
  • Quantum Interface Potential: The system is explicitly designed to interface with diamond color centers (NV, SiV) for realizing hybrid quantum systems leveraging phonons as quantum information carriers.
ParameterValueUnitContext
Optical Resonance (λ0)1529.2nmTelecom C-Band (ω0/2π ~ 196 THz)
Intrinsic Optical Q-factor (Qi)2.70 x 105DimensionlessHigh quality SCD optical cavity
Optical Linewidth (Îș/2π)1.114GHzTotal cavity decay rate
Mechanical Resonance (Flapping Mode)5.52GHzAcoustic flapping mode
Mechanical Q-factor (Flapping Mode)~4100DimensionlessMeasured at room temperature
Mechanical Resonance (Swelling Mode)9.45GHzAcoustic swelling mode
Mechanical Q-factor (Swelling Mode)~7700DimensionlessHighest Qm achieved, room temperature
Mechanical f·Q Product7.3 x 1013HzFigure of merit for mechanical resonators
Single-Photon Coupling (g0/2π)118 ± 6kHzExperimental estimate (Flapping Mode)
Maximum Cooperativity (Cmax)~20DimensionlessAchieved with EDFA input power
Intracavity Photon Capacity (nc,max)~162,000PhotonsInferred maximum capacity at Cmax
Diamond Purity (N content)~1ppbRequired for low dissipation (via EPR)
Substrate Roughness (Initial)< 5nm RMSCommercial polishing specification
Substrate Roughness (Final Prep)< 1nm RMSAchieved via pre-fabrication plasma etch

The Diamond OMC fabrication relies on extreme material purity and sophisticated nanoscale etching techniques to create the suspended nanobeam structures:

  1. High-Purity Material Input: Use of synthetic single-crystal diamond (SCD) synthesized via MPCVD, specifically engineered for ultra-low nitrogen content (~1 ppb N) to minimize optically active defects and absorption.
  2. Crystallographic Alignment: Diamond substrates oriented with a (100) surface normal and nanobeam axis aligned to the in-plane [110] crystallographic direction to enhance robustness against fabrication imperfections.
  3. Advanced Surface Preparation: A two-step ICP-RIE pre-etch (using Ar, Cl2, O2 plasma sequences) was performed to reduce substrate surface roughness to below 1 nm RMS and relieve strain from mechanical polishing.
  4. Patterning: Electron Beam Lithography (EBL) used with a silica etch mask (HSQ resist) defined the 1D photonic crystal cavity structure (elliptical air holes) with defect regions.
  5. Angled-Etching Fabrication: Anisotropic oxygen-based plasma etching was performed at an oblique angle (using a specialized Faraday cage) to undercut and suspend the nanobeam structures, resulting in the required triangular cross-section.
  6. Thermal Annealing: Post-fabrication annealing at 450 °C in a high-purity oxygen environment for 8 hours was critical for cleaning and stabilizing the devices prior to spectroscopy.

This demanding research requires materials and processing capabilities that are core strengths of 6CCVD. We offer the specific high-purity materials and customization services needed to replicate, scale, and extend this work toward commercial quantum devices.

The foundation of this research is ultra-high purity single-crystal diamond (SCD) for its superior mechanical, thermal, and optical properties.

MaterialSpecification6CCVD Capability & Advantage
Optical Grade SCDHigh purity (low ppb N), necessary for large intracavity photon capacity and low optical loss in the telecom band.6CCVD provides SCD with exceptional purity, controlled nitrogen/impurity levels for optimal optical transmission and low mechanical damping. Thicknesses available from 0.1 ”m up to 500 ”m.
Quantum Grade SCDRequired for future integration of high-coherence color centers (NV/SiV) mentioned in the conclusions.6CCVD can supply SCD substrates optimized for targeted defect incorporation (e.g., tailored vacancy concentration or implantation sites).
Boron-Doped Diamond (BDD)(Future consideration) For applications requiring electrical conductivity or specific thermal properties in hybrid systems.6CCVD offers customizable BDD films and substrates with precise doping concentrations.

The experimental success hinged on precise geometry, crystallographic alignment, and ultra-smooth surfaces. 6CCVD excels in providing these exact specifications.

Requirement from Paper6CCVD Customization ServiceValue Proposition
Substrate Dimensions & ThicknessCustom plates/wafers up to 125 mm (PCD equivalent size) and SCD thicknesses up to 500 ”m.We provide large-format, thick SCD wafers essential for supporting high-aspect ratio free-standing nanostructures.
Surface Finish (Ra < 1 nm)SCD Polishing Service: Guaranteed Ra < 1 nm (Atomic smoothness).Our polishing exceeds the experiment’s initial requirement (< 5 nm), reducing surface scattering and minimizing strain precursors prior to the final ICP-RIE clean.
Crystallographic OrientationCustom laser cutting and machining services aligned precisely to the [110] or [100] crystallographic directions.Ensures optimal device alignment necessary for precise photo-elastic coupling calculations and robust device symmetry against etching imperfections.
Metalization IntegrationCustom deposition of Au, Pt, Pd, Ti, W, Cu layers.Essential for creating contacts, bonding pads, or integrating superconducting circuits (as required for quantum readout, ref. 6).

The realization of high-performance diamond OMCs requires specialized knowledge spanning material science, nanofabrication, and quantum physics.

6CCVD’s in-house PhD team specializes in the physics and fabrication of CVD diamond for advanced applications. We can assist engineers and researchers with:

  • Material Selection: Advising on optimal purity, thickness, and crystallographic orientation for quantum optomechanical or color center integration projects.
  • Thermal/Strain Management: Consultation on minimizing thermo-optic bistability and managing intrinsic strain, critical factors that limited the maximum observed cooperativity in the reported experiments.
  • Advanced Polishing: Ensuring the starting substrates meet or exceed the roughness specification (< 1 nm Ra) necessary for high-Q optical cavities operating at 200 THz.

For custom specifications or material consultation, visit 6ccvd.com or contact our engineering team directly. We ship globally (DDU default, DDP available).

View Original Abstract

Cavity-optomechanical systems realized in single-crystal diamond are poised to benefit from its extraordinary material properties, including low mechanical dissipation and a wide optical transparency window. Diamond is also rich in optically active defects, such as the nitrogen-vacancy (NV) and silicon-vacancy (SiV) centers, which behave as atom-like systems in the solid state. Predictions and observations of coherent coupling of the NV electronic spin to phonons via lattice strain have motivated the development of diamond nanomechanical devices aimed at the realization of hybrid quantum systems in which phonons provide an interface with diamond spins. In this work, we demonstrate diamond optomechanical crystals (OMCs), a device platform to enable such applications, wherein the co-localization of ∌200 THz photons and few to 10 GHz phonons in a quasi-periodic diamond nanostructure leads to coupling of an optical cavity field to a mechanical mode via radiation pressure. In contrast to other material systems, diamond OMCs operating in the resolved-sideband regime possess large intracavity photon capacities (>10^5) and sufficient optomechanical coupling rates to reach a cooperativity of ∌20 at room temperature, allowing for the observation of optomechanically induced transparency and the realization of large-amplitude optomechanical self-oscillations.