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Measuring the Magnetic Moment Density in Patterned Ultrathin Ferromagnets with Submicrometer Resolution

MetadataDetails
Publication Date2015-07-13
JournalPhysical Review Applied
AuthorsT. Hingant, Jean-Philippe Tetienne, L. J. Martínez, K. Garcia, D. Ravelosona
InstitutionsUniversité Paris-Sud, Centre National de la Recherche Scientifique
Citations38
AnalysisFull AI Review Included

Technical Documentation: Quantitative Nanoscale Magnetometry using NV-Diamond Probes

Section titled “Technical Documentation: Quantitative Nanoscale Magnetometry using NV-Diamond Probes”

This documentation analyzes the research detailing a novel, high-resolution method for measuring the magnetic moment density ($I_s$) in ultrathin ferromagnetic films using a scanning Nitrogen-Vacancy (NV) center in diamond magnetometer.

The reported research establishes an advanced methodology for nanoscale magnetic characterization, leveraging the atomic-size sensitivity of a diamond-based NV center magnetometer.

  • Four Orders of Magnitude Improvement: The method achieves an unprecedented spatial resolution in the range of $(100 \text{ nm})^2$, improving upon existing SQUID and VSM techniques by at least four orders of magnitude.
  • Quantitative $I_s$ Measurement: Surface density of magnetic moments ($I_s$) is inferred locally from stray field measurements with high precision, yielding uncertainties typically within a few percent.
  • Ambient Operation: The technique operates under ambient conditions and requires no external magnetic field, minimizing parasitic signals from extrinsic magnetic impurities.
  • Key Materials & Geometry: Experiments focused on ultrathin ferromagnetic stacks (Ta/CoFeB/MgO) patterned into 1 ”m-wide wires and 500 nm square dots.
  • Material Sensitivity Demonstrated: The technique successfully measured the modification of $I_s$ induced by localized $\text{He}^{+}$ ion irradiation, quantifying a relative decrease of approximately 40% in the irradiated region.
  • Diamond Probe Requirements: The magnetometer utilizes a single NV center hosted in a diamond nanocrystal ($\sim 50 \text{ nm}$ size) grafted onto an AFM tip, underscoring the demand for high-quality, ultra-small diamond material engineered for probe applications.
ParameterValueUnitContext
Spatial Resolution ($I_s$)$< (100 \text{ nm})^2$Improvement over state-of-the-art methods.
$I_s$ Uncertainty$\sim 1%$ to $3%$Based on statistical fit outcomes.
Probe-Sample Distance ($d$)$50$ to $100$nmLimiting factor for spatial resolution.
Diamond Nanocrystal Size$\sim 50$nmSize of the NV-hosting diamond on the AFM tip.
CoFeB Thickness ($t$)$1$nmUltrathin ferromagnetic layer thickness.
Typical $I_s$ (As Deposited)$97.7 \pm 3.0$”B/nm2Co${20}$Fe${60}$B$_{20}$ sample.
Irradiation Energy$15.5$keV$\text{He}^{+}$ ion irradiation for local modification.
Irradiation Fluence$1.6 \times 10^{15}$ions/cm2Dose used for $I_s$ modification study.
$I_s$ Reduction (Measured)$\sim 40%$Relative decrease in irradiated CoFeB region.
Measurement EnvironmentAmbient$\text{N/A}$NV magnetometry measurement condition.

The core methodology involves utilizing a scanning NV magnetometer integrated with an AFM tip to accurately map the stray magnetic fields above patterned ultrathin magnetic films.

  1. Substrate & Deposition: Multilayer stacks were deposited by PVD (Singulus Tech) onto a $\text{Si}|\text{SiO}_2 (100 \text{ nm})$ substrate.
  2. Layer Stack Geometry: $\text{Ta}(5 \text{ nm})|\text{CoFeB}(1 \text{ nm})|\text{MgO}(2 \text{ nm})|\text{Ta}(5 \text{ nm})$.
  3. CoFeB Stoichiometry: Samples used $\text{Co}{20}\text{Fe}{60}\text{B}{20}$ or $\text{Co}{40}\text{Fe}{40}\text{B}{20}$.
  4. Annealing: Specific samples (for irradiation) were annealed at $300^\circ\text{C}$ for 2 hours.
  5. Patterning: Magnetic wires (1 ”m wide) or square dots (500 nm) were defined using e-beam lithography followed by ion beam etching (etching depth $\delta d$: 10-50 nm).
  6. MW Antenna: A $100 \text{ nm}$ thick Au stripe was defined via a second lithography step to serve as a microwave antenna for NV spin excitation.
  • Probe Setup: A single NV center in a diamond nanocrystal was grafted onto the apex of an AFM tip (tapping mode operation).
  • Detection Principle: The stray magnetic field ($\vec{B}{\text{NV}}$) projection along the NV axis induces a Zeeman shift ($\Delta f{\text{NV}}$) in the NV center’s ESR frequency.
  • Data Acquisition: Scanning the NV probe across the sample edge records the $\Delta f_{\text{NV}}$ profile and the corresponding AFM topography ($\text{topo}(x)$).
  • Quantitative Fitting: Experimental $\Delta f_{\text{NV}}$ profiles were fitted using analytical equations derived for the stray field of a 1D magnetic wire (thin-film approximation), incorporating the measured topography function $z(x) = d + \text{topo}(x)$.
  • Parameter Extraction: The fit yields the surface magnetic moment density ($I_s$) and the stand-off distance ($d$).
  • Masking: A $400 \text{ nm}$ thick PMMA layer was used as a masking layer with open 1 ”m-wide windows defined by e-beam lithography.
  • Irradiation: The sample was irradiated with $\text{He}^{+}$ ions (15.5 keV) through the PMMA mask to locally modify the magnetic properties of the CoFeB layer, achieving high spatial control ($\sim 100 \text{ nm}$).

The success of this research hinges directly on accessing high-quality diamond material and advanced nanofabrication capabilities. 6CCVD is uniquely positioned to supply and engineer the critical diamond components required for replicating, extending, and industrializing this NV-based metrology.

To replicate the NV magnetometry probe used in this study, researchers require diamond with exceptionally low defects and precise characteristics.

Material Requirement6CCVD SolutionTechnical Advantage for NV Centers
NV Probe MaterialOptical Grade SCD (Single Crystal Diamond)Required for controlled NV center creation and maintaining long coherence times for sensitive measurements.
All-Diamond Tips (Future)Custom SCD Substrates/Tips6CCVD can grow SCD material suitable for forming integrated scanning probes, enabling lower stand-off distances ($d < 10 \text{ nm}$) for enhanced resolution.
Potential SubstratesSCD Substrates (up to $500 \text{ ”m}$ thickness)Providing large, uniform, high-purity surfaces for advanced diamond synthesis and subsequent tip/probe fabrication.

The experimental setup required precise microfabrication, including complex multilayer thin films, etching, and metal antenna structures. 6CCVD’s capabilities directly address these engineering needs.

Research Requirement6CCVD Customization ServiceValue Proposition
Antenna FabricationCustom Metalization (Au, Ti, Pt, W, Cu)We provide internal capability to deposit the required $100 \text{ nm}$ thick Au microwave antennae directly onto customized diamond substrates or polished wafers.
Probe GeometryLaser Micromachining and Custom Dimensions6CCVD offers laser cutting for complex geometries, crucial for shaping diamond probes, ensuring compatibility with specific AFM cantilever systems and tight integration tolerances.
Surface QualityUltra-Polishing (Ra < 1 nm for SCD)High-quality polishing is essential for minimizing surface noise and ensuring stable probe-sample distance ($d$) during scanning measurements.
Scale-Up PotentialLarge-Area PCD/SCD WafersWhile the experiments used small microstructures, 6CCVD can supply SCD or PCD wafers up to $125 \text{ mm}$ for developing scalable fabrication processes.

This work demonstrates the crucial role of MPCVD diamond in advanced quantum sensing for solid-state physics and materials science. 6CCVD provides unparalleled expertise in this domain.

> 6CCVD’s in-house PhD engineering team specializes in diamond material selection and optimization for quantum sensing and nanoscale metrology applications, including NV center fabrication and integration. We can assist researchers and engineers with designing custom diamond components specifically tailored to achieve the lowest possible probe-to-sample distance ($d$) in magnetic imaging projects, thereby maximizing spatial resolution.

For custom specifications or material consultation, visit 6ccvd.com or contact our engineering team directly. We ship globally, offering DDU (Delivery Duty Unpaid) as default, with DDP (Delivery Duty Paid) available upon request.

View Original Abstract

We present a new approach to infer the surface density of magnetic moments\n$I_s$ in ultrathin ferromagnetic films with perpendicular anisotropy. It relies\non quantitative stray field measurements with an atomic-size magnetometer based\non the nitrogen-vacancy center in diamond. The method is applied to\nmicrostructures patterned in a 1-nm-thick film of CoFeB. We report measurements\nof $I_s$ with a few percent uncertainty and a spatial resolution in the range\nof $(100$ nm)$^2$, an improvement by several orders of magnitude over existing\nmethods. As an example of application, we measure the modifications of $I_s$\ninduced by local irradiation with He$^+$ ions in an ultrathin ferromagnetic\nwire. This method offers a new route to study variations of magnetic properties\nat the nanoscale.